I currently use 17-7 PH stainless which is hardened to condition CH after forming. raw matl is .1.75"X .12" X .008". Its main usage after hardening is silicon wafer retainer where it's contantly cycled up and down to putin and remove wafer after 40-60 sec process at 400C temp. At this high temperature this part seemed to deform after a a couple of hundred wafer which is what it was designed for in the first place. THere is a proposal to go to a different material to increase lifeline of this part. My question is..... can 321 SST be a plugin replacement. I know this has a higher temp rating but how about its forming characteristics, will it have spring properties, and wont become brittle after prolonged exposure to 400C.

0 Answers   Novellus,

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